Fabrication of three-dimensional microlens arrays in sol-gel glass

被引：8

作者：

Orhan, JB ^{[1
]}

Parashar, VK ^{[1
]}

Sayah, A ^{[1
]}

Gijs, MAM ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期

关键词：

microlens array; sol-gel process; replication technology; photoresist reflow; high aspect ratio;

D O I：

10.1016/j.mee.2006.01.045

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel technological approach for the realization of three-dimensional microlens arrays in sol-gel glass. Hundred Micron thick cylindrical SU-8 structures are used to generate a polydimethylsiloxane (PDMS) mold that is subsequently filled with AZ 4562 photoresist. During a thermal softening process, the upper part of the photoresist cylinder transforms into a spherical-like shape. An in-house developed sol-gel material with low shrinkage is then used to replicate via a second PDMS mold the photoresist lenses into crack-free glass structures with optical quality. (c) 2006 Published by Elsevier B.V.

引用

页码：1329 / 1332

页数：4

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