Fabrication of three-dimensional microlens arrays in sol-gel glass

被引：8

作者：

Orhan, JB ^{[1
]}

Parashar, VK ^{[1
]}

Sayah, A ^{[1
]}

Gijs, MAM ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期

关键词：

microlens array; sol-gel process; replication technology; photoresist reflow; high aspect ratio;

D O I：

10.1016/j.mee.2006.01.045

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel technological approach for the realization of three-dimensional microlens arrays in sol-gel glass. Hundred Micron thick cylindrical SU-8 structures are used to generate a polydimethylsiloxane (PDMS) mold that is subsequently filled with AZ 4562 photoresist. During a thermal softening process, the upper part of the photoresist cylinder transforms into a spherical-like shape. An in-house developed sol-gel material with low shrinkage is then used to replicate via a second PDMS mold the photoresist lenses into crack-free glass structures with optical quality. (c) 2006 Published by Elsevier B.V.

引用

页码：1329 / 1332

页数：4

共 50 条

[1] Fabrication and characterization of three-dimensional microlens arrays in sol-gel glass
Orhan, Jean-Baptiste
Parashar, Virendra Kumar
Sayah, Abdeljalil
Gijs, Martin A. M.
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (05) : 1159 - 1164
[2] Sol-gel process to cast quartz glass microlens arrays
Kreuzberger, Thomas
Harnisch, Alf
Helgert, Michael
Erdmann, Lars
Brunner, Robert
[J]. MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 1173 - 1175
[3] The in vitro bioactive of sol-gel bioactive glass powders with three-dimensional lamellar structure
Li, Zhengmao
Chen, Xiaofeng
Lin, Cai
Zhao, Naru
[J]. ADVANCED POWDER TECHNOLOGY, 2012, 23 (01) : 13 - 15
[4] Single step fabrication of microlens arrays with hybrid HfO2-SiO2 sol-gel glass on conventional lens surface
Zhao, FH
Xie, YJ
He, SP
Fu, SJ
Lu, ZW
[J]. OPTICS EXPRESS, 2005, 13 (15): : 5846 - 5852
[5] Fabrication of Three-Dimensional Nanostructured Titania Materials by Prism Holographic Lithography and the Sol-Gel Reaction
Park, Sung-Gyu
Jeon, Tae Yoon
Yang, Seung-Man
[J]. LANGMUIR, 2013, 29 (31) : 9620 - 9625
[6] Fabrication of Three-Dimensional Battery Using Ceramic Electrolyte with Honeycomb Structure by Sol-Gel Process
Kotobuki, Masashi
Suzuki, Yuji
Munakata, Hirokazu
Kanamura, Kiyoshi
Sato, Yosuke
Yamamoto, Kazuhiro
Yoshida, Toshihiro
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 157 (04) : A493 - A498
[7] Simple fabrication of cylindrical sol-gel microlens array by reflowing technique
He, M
Yuan, XC
Ngo, NQ
Cheong, WC
Bu, J
[J]. OPTICAL ENGINEERING, 2003, 42 (08) : 2180 - 2181
[8] Reflow technique for the fabrication of an elliptical microlens array in sol-gel material
He, M
Yuan, XC
Ngo, NQ
Cheong, WC
Bu, J
[J]. APPLIED OPTICS, 2003, 42 (36) : 7174 - 7178
[9] Fabrication and mechanical properties of three-dimensional carbon fibre reinforced mullite composites via sol-gel
Ma, QS
Chen, ZH
Zheng, WW
Hu, HF
[J]. RARE METAL MATERIALS AND ENGINEERING, 2004, 33 : 111 - 114
[10] Fabrication of hybrid sol-gel glass diffractive elements
Rantala, JT
Äyräs, P
Levy, R
Descour, MR
Honkanen, S
Peyghambarian, N
[J]. INTEGRATED OPTICS DEVICES III, 1999, 3620 : 212 - 218

← 1 2 3 4 5 →