High temperature-induced abnormal suppression of sub-threshold swing and on-current degradations under hot-carrier stress in a-InGaZnO thin film transistors

被引:24
|
作者
Tsai, Ming-Yen [1 ]
Chang, Ting-Chang [2 ,3 ]
Chu, Ann-Kuo [1 ]
Hsieh, Tien-Yu [2 ]
Chen, Te-Chih [2 ]
Lin, Kun-Yao [2 ]
Tsai, Wu-Wei [4 ]
Chiang, Wen-Jen [4 ]
Yan, Jing-Yi [4 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 80424, Taiwan
[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[3] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan
[4] Ind Technol Res Inst, Hsinchu 31040, Taiwan
关键词
LIGHT ILLUMINATION; MEMORY;
D O I
10.1063/1.4813090
中图分类号
O59 [应用物理学];
学科分类号
摘要
This letter investigates the effect of temperature on hot-carrier stress-induced degradation behavior in InGaZnO thin film transistors. After hot-carrier stress at 25 degrees C, serious on-current and subthreshold swing degradations are observed due to trap state generation near the drain side. For identical stress performed at elevated temperatures, current degradation in the I-V transfer curve under reverse mode is gradually suppressed and the anomalous hump in the gate-to-drain capacitance-voltage curve becomes more severe. These suppressed degradations and the more severe hump can be both attributed to hole-trapping near the drain side due to high drain bias at high temperature. (C) 2013 AIP Publishing LLC.
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页数:5
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