Characteristics of gas flow within a micro diffuser/nozzle pump

被引：3
|
作者：
Li Xiu-Han
Yu Xiao-Mei [1 ]
Zhang Da-Cheng
Cui Hai-Hang
Li Ting
Wang Ying
Wang Yang-Yuan
机构：
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
[2] Chinese Acad Sci, Inst Mech, Beijing 100080, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2006年 / 23卷 / 05期
关键词：
D O I：
10.1088/0256-307X/23/5/046
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The gas flow characteristics for various shapes of micro diffuser/nozzles have been experimentally investigated. The micro diffuser/nozzles with the lengths of 70 mu m, 90 mu m, 125 mu m and the taper angles of 7 degrees, 10 degrees, 14 degrees are designed and fabricated based on silicon micromachining technology for optimizing and comparing. The flat-wall diffuser/nozzle is 40 mu m x 5 mu m in depth and width. An experimental setup is designed to measure the gas flow rates under controlled temperature and pressure condition. Optimized values for the taper angle and the length of the diffuser/nozzle are experimentally obtained.
引用
收藏
页码：1230 / 1233
页数：4
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