Selective ion-induced grain growth: Thermal spike modeling and its experimental validation

被引：11
|
作者：
Seita, Matteo [1 ]
Schaeublin, Robin [2 ]
Doebeli, Max [3 ]
Spolenak, Ralph [1 ]
机构：
[1] ETH, Dept Mat, Lab Nanomet, CH-8093 Zurich, Switzerland
[2] EPFL, Ctr Rech Phys Plasmas, Assoc Euratom Confederat Suisse, CH-5232 Villigen, Switzerland
[3] ETH, Dept Phys, Lab Ion Beam Phys, CH-8093 Zurich, Switzerland
来源：
ACTA MATERIALIA | 2013年 / 61卷 / 16期
基金：
瑞士国家科学基金会;
关键词：
Theory and modeling; Ion irradiation; Grain growth; Texture;
D O I：
10.1016/j.actamat.2013.06.056
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ion-bombardment-induced selective grain growth is a process that allows for full control of the orientation of vapor-deposited thin films, which can be converted from fiber-textured polycrystalline to single-crystal films. The main mechanisms behind this phenomenon are explained by a new thermal spike model, which takes into account and compares the different driving forces governing the film microstructure evolution upon irradiation and emphasizes the importance of the thermal spike shape and volume. The strong agreement between model and experimental data confirms that selective grain growth is driven by the minimization of the volume free energy. (C) 2013 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：6171 / 6177
页数：7
相关论文
共 50 条
  • [41] THERMAL AND ION-INDUCED RELEASE OF HYDROGEN-ATOMS IMPLANTED INTO GRAPHITE
    MOLLER, W
    BORGESEN, P
    SCHERZER, BMU
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 826 - 831
  • [42] THERMAL AND ION-INDUCED RELEASE OF HYDROGEN ATOMS IMPLANTED INTO GRAPHITE.
    Moeller, W.
    Borgesen, P.
    Scherzer, B.M.U.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B19-20 (pt 2 Feb III) : 826 - 831
  • [43] Thermal modeling of solar stills: an experimental validation
    Shukla, SK
    Sorayan, VPS
    RENEWABLE ENERGY, 2005, 30 (05) : 683 - 699
  • [44] Modification of a deformation induced grain growth model of superplasticity and its experimental verification
    Jinshu Xuebao, 7 (770-772):
  • [45] Room-temperature growth of ion-induced carbon nanofibers: Effects of ion species
    Yamaguchi, K.
    Kitazawa, M.
    Wang, Z. P.
    Sugita, Y.
    Tanaka, J.
    Tanemura, M.
    Hayashi, Y.
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 525 - 528
  • [46] INFLUENCE OF DOPING ON ION-INDUCED GROWTH AND SHRINKAGE OF PARTIAL DAMAGE IN SILICON
    BATTAGLIA, A
    PRIOLO, F
    RIMINI, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 382 - 385
  • [47] Monitoring growth of ultrathin films via ion-induced electron emission
    Bernhard, T
    Winter, H
    PHYSICAL REVIEW B, 2005, 71 (24)
  • [48] Modeling and experimental validation of austenite dendrite growth
    Mampaey, F
    TRANSACTIONS OF THE AMERICAN FOUNDRYMEN'S SOCIETY, VOL 106, 1998, 106 : 469 - 476
  • [49] THERMAL AND ION-INDUCED REACTION OF NI-AU DILUTE ALLOYS ON SI
    HUNG, LS
    ZHENG, LR
    MAYER, JW
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (10) : 5755 - 5759
  • [50] SFM study of ion-induced hillocks on LiF exposed to thermal and optical annealing
    Müller, C
    Benyagoub, A
    Lang, M
    Neumann, R
    Schwartz, K
    Toulemonde, M
    Trautmann, C
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 209 : 175 - 178
12345