Carbon reference Auger electron spectra measured with a high-performance cylindrical mirror analyzer

Secondary electron and Auger electron spectra for two types of carbons, graphite and soot (glassy), have been measured in an absolute manner with a novel cylindrical mirror analyzer for primary energies 1 eV through 5 keV. The Auger electron, elastically backscattered primary, energy-loss, secondary-electron, and background signals have been related. The degree of crystallization modifies the characteristics of the secondary and energy-loss spectra drastically, though the background continuum was not changed appreciably. Different Auger electron yields were obtained for graphite and soot. It has been found that both graphite and soot are promising candidates as reference materials for studying the properties of instruments. (C) 1996 American Vacuum Society.