AZIMUTHAL DEPENDENCE OF AUGER-ELECTRON SPECTRA OBSERVED WITH A CYLINDRICAL MIRROR ANALYZER FOR SI SINGLE-CRYSTAL AND AMORPHOUS SURFACES

被引：1
|
作者：
SAKAKIBARA, N [1 ]
HISADA, Y [1 ]
YAMADA, Y [1 ]
HATTORI, T [1 ]
GOTO, K [1 ]
机构：
[1] NAGOYA INST TECHNOL,DEPT SYST ENGN,SHOWA KU,NAGOYA,AICHI 466,JAPAN
来源：
APPLIED SURFACE SCIENCE | 1993年 / 72卷 / 02期
关键词：
D O I：
10.1016/0169-4332(93)90012-Z
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The azimuthal dependence of Auger electron spectra for Si single crystal and amorphous surfaces, Si(LVV) and Si(KLL), observed with a cylindrical mirror analyzer (CMA) were studied in relation to their low-energy electron diffraction (LEED) patterns. For the Si(111)7 x 7 surface, the peak heights of the Si(LVV) Auger electron spectra were observed to have a variation of 15% (maxima to minima) with an azimuth-angle period of 60-degrees, whereas those for the Si(111) and amorphous Si surfaces, displaying diffuse LEED patterns, showed a spectral deviation within 1.0% standard deviation for the azimuth. It was found that the sharp and diffuse LEED patterns had a close relation with the observed Auger spectra obtained by a conventional CMA having a considerably large detection area of Auger electrons.
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页码：195 / 199
页数：5
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