The Establishment of Unified Coordinate System In Microtarget-Automatic-Assembly System

There are three subsystems in Microtarget-Automatic-Assembly System which is used in Inertial Confinement Fusion(ICF). It is microscopic image measurement subsystem,confocal probe measurement subsystem and three-dimensional motion subsystem. It is necessary to establish a unified coordinate system in order to interact information in three subsystems and provide accurate and reliable position and attitude information for micro-operating system. Each coordinate system and its errors are analyzed in this paperin the end,the way to establish the unified coordinate system is given. It is proved that this subsystem meets the requirements for precision.