A Miniaturized PM2.5 Sensor Module Based on a Thin-Film Piezoelectric-on-Silicon MEMS Oscillator

被引:3
|
作者
Weng, Chien-Hao [1 ]
Wu, Cheng-Yen [1 ]
Pillai, Gayathri [1 ]
Tseng, Sheng-Hsian [2 ]
Yeh, Chih-Yuan [2 ]
Juang, Ying-Zong [2 ]
Li, Sheng-Shian [1 ,3 ]
机构
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan
[2] Taiwan Semicond Res Inst, Chip Implementat Serv Div, Hsinchu, Taiwan
[3] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan
来源
2021 IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IEEE ISAF 2021) / INTERNATIONAL SYMPOSIUM ON INTEGRATED FUNCTIONALITIES (ISIF) / PIEZORESPONSE FORCE MICROSCOPY WORKSHOP (PFM) | 2021年
关键词
Air quality; PM2.5; aerosol; impactor; piezoelectric; MEMS; resonators; oscillators; mass resolution;
D O I
10.1109/ISAF51943.2021.9477329
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study reports on a miniaturized PM2.5 sensor module utilizing a thin-film piezoelectric-on-silicon (TPoS) MEMS oscillator with real-time detection and high mass resolution. An aerosol impactor is used to serve as a particle size-selective sampler. A TPoS MEMS resonator utilizes a length-extensional mode with a quality factor (Q) of 1109 and a resonant frequency of 5.79 MHz in air. A transimpedance amplifier (TIA) interface circuit using UMC 0.18 mu m CMOS technology is implemented, having an impedance gain of 81.64 dB square. To demonstrate a miniaturized mass sensor module, a board-level oscillator is integrated by a TPoS resonator, an in-house designed TIA IC interface circuit, an all-pass filter based phase shifter, buffer circuits, and a band-pass filter to fulfill Barkhausen criteria. For a carrier frequency of 5.79 MHz, a phase noise of -102.54 dBc/Hz at 1 kHz offset in air is recorded while the mass resolution of 0.21 pg for the PM2.5 sensor is demonstrated in this study. Finally, the aerosol measurement results within the concentration of 10 mu g/m(3) to 1000 mu g/m(3) show the coefficient of determination (R-2) of 0.84 between the frequency slope and the environment concentration of aerosol.
引用
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页数:4
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