Electron-beam lithography fabrication of phase holograms to generate Laguerre-Gaussian beams

The Laguerre-Gaussian beam is an optical beam with a phase singularity that propagates along its axis. We have fabricated blazed phase holograms to generate these beams using electron-beam lithography techniques. The resulting holograms were illuminated with a Gaussian beam, and the phase distribution of the resulting beams were examined by analyzing interference fringes with the Fourier-transform method.