Electron-beam lithography fabrication of phase holograms to generate Laguerre-Gaussian beams

被引：11

作者：

Miyamoto, Y ^{[1
]}

Masuda, M ^{[1
]}

Wada, A ^{[1
]}

Takeda, M ^{[1
]}

机构：

[1] Univ Electrocommun, Dept Commun & Syst Engn, Chofu, Tokyo 1928585, Japan

来源：

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99) | 1999年 / 3740卷

关键词：

Laguerre-Gaussian beam; doughnut beam; phase singularity; hologram; diffractive optics; electron-beam lithography; interferometry; fringe analysis; Fourier transform;

D O I：

10.1117/12.347806

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The Laguerre-Gaussian beam is an optical beam with a phase singularity that propagates along its axis. We have fabricated blazed phase holograms to generate these beams using electron-beam lithography techniques. The resulting holograms were illuminated with a Gaussian beam, and the phase distribution of the resulting beams were examined by analyzing interference fringes with the Fourier-transform method.

引用

页码：232 / 235

页数：4

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