Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography

被引:15
|
作者
Yokota, Yukie [1 ]
Ueno, Kosei [1 ]
Mizeikis, Vygantas [1 ]
Juodkazis, Saulius [1 ]
Sasaki, Keiji [1 ]
Misawa, Hiroaki [1 ]
机构
[1] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010021, Japan
关键词
localized surface plasmons; metalic nanoparticles; noble metals; optical antenna;
D O I
10.1117/1.2832749
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Highly homogeneous arrays of Ag, Au and Cu nanorods were fabricated on glass substrates using electron-beam lithography and lift-off techniques. Optical properties of the fabricated structures related to localized surface plasmons (LSP), and their dependencies on the nanorod size were studied experimentally by optical extinction spectroscopy. Spectral tuning of LSP resonant scattering bands in a wide spectral range, from visible to near-infrared wavelengths, can be accomplished by tailoring of the nanorod dimensions, aspect ratios, and heights. The observed results qualitatively agree with Gans theory and numerical modeling by finite-difference time-domain technique.
引用
收藏
页数:15
相关论文
共 50 条
  • [21] High-resolution capability of optical near-field imprint lithography
    Yatsui, T.
    Nakajima, Y.
    Nomura, W.
    Ohtsu, M.
    APPLIED PHYSICS B-LASERS AND OPTICS, 2006, 84 (1-2): : 265 - 267
  • [22] Flexible Tuning Surface Plasmon Resonance of Metallic Nanostructures Fabricated by Colloidal Lithography
    Xu, L.
    Liu, C. H.
    Cheung, H. W.
    Tan, L. S.
    Hong, M. H.
    MALAYSIA ANNUAL PHYSICS CONFERENCE 2010 (PERFIK-2010), 2011, 1328 : 19 - 23
  • [23] HIGH-RESOLUTION LITHOGRAPHY WITH A VACUUM STM
    MARRIAN, CRK
    DOBISZ, EA
    ULTRAMICROSCOPY, 1992, 42 : 1309 - 1316
  • [24] HIGH-RESOLUTION LITHOGRAPHY WITH PROJECTION PRINTING
    MORITZ, H
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) : 705 - 710
  • [25] GENERAL PROBLEMS OF HIGH-RESOLUTION LITHOGRAPHY
    MLADENOV, GM
    SEYFARTH, H
    VACUUM, 1986, 36 (10) : 649 - 653
  • [26] Future trends in high-resolution lithography
    Lawes, RA
    APPLIED SURFACE SCIENCE, 2000, 154 : 519 - 526
  • [27] DEEP ULTRAVIOLET HIGH-RESOLUTION LITHOGRAPHY
    MCCULLOUGH, AW
    SEWELL, H
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 394 : 107 - 113
  • [28] Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography
    Keil, Matthias
    Wetzel, Alexandre Emmanuel
    Wu, Kaiyu
    Khomtchenko, Elena
    Urbankova, Jitka
    Boisen, Anja
    Rindzevicius, Tomas
    Bunea, Ada-Ioana
    Taboryski, Rafael J.
    NANOSCALE ADVANCES, 2021, 3 (08): : 2236 - 2244
  • [29] Large scale periodic magnetic nanostructures fabricated by optical interference lithography
    Carl, A
    Kirsch, S
    Wassermann, EF
    NANOPATTERNING-FROM ULTRALARGE-SCALE INTERGRATION TO BIOTECHNOLOGY, 2002, 705 : 291 - 302
  • [30] Optical Nanostructures Fabricated by SU-8 based Nanoimprint Lithography
    Liu, R.
    Lu, B. -R.
    Xie, S. -Q.
    Wan, J.
    Shu, Z.
    Qu, X. -P.
    Chen, Y.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 55 (03) : 1290 - 1294