Overtone Lame-mode quartz crystal resonators fabricated by an etching process

被引:3
|
作者
Kawashima, H
Matsuyama, M
机构
关键词
Lame-mode; overtone; quartz crystal resonator; etching process; zero temperature coefficient;
D O I
10.1143/JJAP.35.3046
中图分类号
O59 [应用物理学];
学科分类号
摘要
A quartz crystal resonator of Lame-mode vibrating in overtone (m = 3, n = 1) is very available for realization of a frequency over approximately 3 MHz because its frequency constant has a value of 360 kHz . cm at a cut angle phi = 36 degrees and its frequency is dependent upon contour dimensions of the resonator. In this paper, relationships of frequency constant (f . 2z(0)), frequency temperature coefficients alpha, beta and a capacitance ratio r versus cut angle phi, and also frequency temperature behavior are, respectively, shown theoretically and experimentally. The calculated values agree well with the measured ones: and a quartz crystal resonator of Lame-mode vibrating in overtone (m = 3; n = 1) is successfully obtained with a zero temperature coefficient at room temperature, a small series resistance R(1) and a small capacitance ratio r.
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页码:3046 / 3049
页数:4
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