Overtone Lame-mode quartz crystal resonators fabricated by an etching process

被引:3
|
作者
Kawashima, H
Matsuyama, M
机构
关键词
Lame-mode; overtone; quartz crystal resonator; etching process; zero temperature coefficient;
D O I
10.1143/JJAP.35.3046
中图分类号
O59 [应用物理学];
学科分类号
摘要
A quartz crystal resonator of Lame-mode vibrating in overtone (m = 3, n = 1) is very available for realization of a frequency over approximately 3 MHz because its frequency constant has a value of 360 kHz . cm at a cut angle phi = 36 degrees and its frequency is dependent upon contour dimensions of the resonator. In this paper, relationships of frequency constant (f . 2z(0)), frequency temperature coefficients alpha, beta and a capacitance ratio r versus cut angle phi, and also frequency temperature behavior are, respectively, shown theoretically and experimentally. The calculated values agree well with the measured ones: and a quartz crystal resonator of Lame-mode vibrating in overtone (m = 3; n = 1) is successfully obtained with a zero temperature coefficient at room temperature, a small series resistance R(1) and a small capacitance ratio r.
引用
收藏
页码:3046 / 3049
页数:4
相关论文
共 50 条
  • [1] Lame-mode quartz crystal resonators
    Kawashima, H
    Matsuyama, M
    Sunaga, K
    [J]. PROCEEDINGS OF THE 1996 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (50TH ANNIVERSARY), 1996, : 416 - 421
  • [2] Lame-mode miniaturized quartz temperature sensors
    Kanie, H
    Kawashima, H
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2000, 47 (02) : 341 - 345
  • [3] Characterization of SOI Lame-mode Square Resonators
    Khine, Lynn
    Palaniapan, Moorthi
    Shao, Lichun
    Wong, Wai-Kin
    [J]. 2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, : 625 - 628
  • [4] Piezoelectrically Transduced Lame-mode Resonators and Oscillators
    Pillai, Gayathri
    Zope, Anurag A.
    Li, Sheng Shian
    [J]. 2018 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2018, : 324 - 325
  • [5] Quartz microresonator temperature sensors using Lame-mode
    Seiko Instruments Inc, Tokyo, Japan
    [J]. Proc Annu IEEE Int Freq Control Symp, (1049-1053):
  • [6] Quasi-Lame-mode quartz-crystal resonators
    Shimizu, Y
    Murota, M
    Kawashima, H
    Yokoyama, Y
    Kubota, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (5B): : 3010 - 3013
  • [7] Quasi-Lame-mode quartz-crystal resonators
    Shimizu, Y.
    Murota, M.
    Kawashima, H.
    Yokoyama, Y.
    Kubota, T.
    [J]. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2000, 39 (5 B): : 3010 - 3013
  • [8] TEMPERATURE-COMPENSATED PIEZOELECTRICALLY ACTUATED LAME-MODE RESONATORS
    Thakar, Vikram
    Rais-Zadeh, Mina
    [J]. 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2014, : 214 - 217
  • [9] IN-SITU OVENIZATION OF LAME-MODE SILICON RESONATORS FOR TEMPERATURE COMPENSATION
    Chen, Yunhan
    Ng, Eldwin J.
    Yang, Yushi
    Ahn, Chae Hyuck
    Flader, Ian
    Kenny, Thomas W.
    [J]. 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 809 - 812
  • [10] 12.9MHz lame-mode differential SOI bulk resonators
    Khine, Lynn
    Palaniapan, Moorthi
    Wong, Wai-Kin
    [J]. TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,