A Swarm Intelligence Based Rescheduling Method for Semiconductor Wafer Fabrication Facilities

被引：2
|
作者：
Li, Li [1 ]
Fei, Qiao [1 ]
机构：
[1] Tongji Univ, Sch Elect & Informat Engn, Shanghai 201804, Peoples R China
来源：
MEASURING TECHNOLOGY AND MECHATRONICS AUTOMATION, PTS 1 AND 2 | 2011年 / 48-49卷
关键词：
semiconductor manufacturing; rescheduling; swarm intelligence;
D O I：
10.4028/www.scientific.net/AMM.48-49.123
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An effective rescheduling method takes an important role on improving the operational performance of a semiconductor wafer fabrication facility (fabs). In this paper, we propose a rescheduling method based on swarm intelligence. Firstly, we build a swarm intelligence based rescheduling model (SIRM) including an ant queen agent, multiple job ant agents and machine ant agents. Secondly, we design a rescheduling algorithm (CMRA) composed of three sub-algorithms: sub-algorithm-1 is used by an ant queen agent to transfer an existing static optimized scheduling plan into additional pheromones of job ant agents; sub-algorithm-2 and sub-algorithm-3 are used to convert scheduling related real-time information to dynamic pheromones of job ant agents and machine ant agents, respectively. Finally, a simplified semiconductor wafer fab model is used to verify and validate CMRA. The simulation results demonstrate that CMRA is superior to the original scheduling method to generate a static optimized scheduling plan with better performance on move, step and on-time operational due date rate under uncertain production environments.
引用
收藏
页码：123 / 126
页数：4
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