Monolithic integration of tunable aperture and lens for distance sensor

被引：0
|
作者：
Kim, Yumee [1 ]
Chun, Kukjin [1 ]
Saad, Ismail [2 ]
机构：
[1] Seoul Natl Univ, Dept Elect & Comp Engn, Seoul, South Korea
[2] Univ Malaysia Sabah, Fac Engn, Kota Kinabalu, Sabah, Malaysia
来源：
2020 INTERNATIONAL CONFERENCE ON ELECTRONICS, INFORMATION, AND COMMUNICATION (ICEIC) | 2020年
基金：
新加坡国家研究基金会;
关键词：
monolithic integration; tunable aperture; glass concave lens; distance sensor; ADAS; GLASS; ARRAYS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A tunable aperture and lens are monolithically fabricated in wafer-level. The tunable aperture inserted in a camera can estimate distance as comparing blur of images by two different size apertures. We design optical system and integrate tunable aperture and first lens of camera. The plano-concave lens is fabricated by anodic bonding and thermal reflow under atmospheric pressure with one mask. The silicon substrate is used as spacer between tunable aperture and lens. Another glass substrate is attached to the silicon substrate by triple anodic bonding for tunable aperture operated by liquid crystal. The lens has diameter of 4.5 mm and sag height of 566 um and the tunable aperture has f-numbers of 1.8 and 4.0. This fabrication can control parameter of lens easily. Also, it can reduce error by alignment and gap among apertures and lenses. This distance sensor can be applied to the Advanced Driver Assistance System (ADAS).
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页数：3
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