共 50 条
- [33] Silicon carbon-nitride ceramics - a high temperature semiconductor material for MEMS applications 2002 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, PROCEEDINGS, 2002, 4931 : 538 - 542
- [35] Initial description of a new carbon-nitride phase synthesized at high pressures and temperatures Materials Science and Engineering A, 1996, 209 (1-2): : 23 - 25