FEM ANALYSIS OF RESPONSE MECHANISM FOR TEMPERATURE SENSORS BASED ON SURFACE ACOUSTIC WAVE RESONATORS

被引：2

作者：

Hao, Wen-chang ^{[1
]}

Luo, Wei ^{[1
]}

Zhao, Guang-hong ^{[1
]}

Jiao, Hai-long ^{[1
]}

Yin, Yu-gang ^{[1
]}

机构：

[1] Beijing Res Inst Telemetry, Beijing 100076, Peoples R China

来源：

PROCEEDINGS OF THE 2019 13TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS (SPAWDA) | 2019年

关键词：

Temperature sensor; SAW resonator; Response mechanism; Finite element method; CUTS;

D O I：

10.1109/spawda.2019.8681805

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The response mechanism for temperature sensors based on surface acoustic wave (SAW) resonators was analyzed by using the finite element method (FEM). Modeling the periodic electrodes on a piezoelectric substrate in COMSOL, the material parameters and the thermal expansion of the periodic structure at different temperatures were considered. By using the modal analysis and the harmonic frequency response analysis, the relative frequency change of the SAW temperature sensor was deduced. The numerical results of frequency-temperature behavior for Y+33 degrees-X quartz and Y+36 degrees-X quartz agree well with the reported experimental results, confirming the efficiency of the proposed theoretical analysis. The FEM analysis can provide an effective guide for the application of SAW temperature sensors.

引用

页数：5

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