Relationships between subsurface damage depth and surface roughness of grinded glass optics

被引：1
|
作者：
Blaineau, P. [1 ]
Laheurte, R. [1 ]
Darnis, P. [1 ]
Darbois, N.
Cahuc, O. [1 ]
Neauport, J.
机构：
[1] Univ Bordeaux, I2M, UMR 5295, F-33400 Talence, France
来源：
OPTIFAB 2013 | 2013年 / 8884卷
关键词：
subsurface damage; surface roughness; Abbott Firestone; fused silica glass;
D O I：
10.1117/12.2028880
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (Rt) have been widely studied and present a major interest for an easy assessment of the SSD depth. We seek the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that the Abbott-Firestone parameter Mr2, which can be linked to the volume fraction of valley in the roughness profile, is more accurate than Rt for an assessment of the SSD depth and that the relationship between Mr2 and the SSD depth varies when changing the grinding mode.
引用
收藏
页数：5
相关论文
共 50 条
  • [21] ROUGHNESS CRITERIA AND RELATIONSHIPS BETWEEN SURFACE ROUGHNESS AND FLOW NOISE
    FRANZ, GJ
    JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1968, 44 (01): : 394 - &
  • [22] Detection of subsurface damage depth of optical glass via chemical etching technology
    Wang, Hua-Dong
    Jiang, Wei-Feng
    Peng, Guang-Jian
    Zhang, Tai-Hua
    Zhang, Tai-Hua (zhangth@zjut.edu.cn), 1600, Chongqing Wujiu Periodicals Press (49): : 326 - 333
  • [23] Effect of grinding parameters on surface roughness and subsurface damage and their evaluation in fused silica
    Xiao, Huapan
    Chen, Zhi
    Wang, Hairong
    Wang, Jiuhong
    Zhu, Nan
    OPTICS EXPRESS, 2018, 26 (04): : 4638 - 4655
  • [24] Surface roughness and material-removal rate with magnetorheological finishing without subsurface damage of the surface
    Cheng, HB
    Feng, ZJ
    Wang, YW
    JOURNAL OF OPTICAL TECHNOLOGY, 2005, 72 (11) : 865 - 871
  • [25] Relationship between subsurface damage depth and breaking strength for brittle materials
    Lakhdari, Fouad
    Belkhir, Nabil
    Bouzid, Djamel
    Herold, Volker
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2019, 102 (5-8): : 1421 - 1431
  • [26] Relationship between subsurface damage depth and breaking strength for brittle materials
    Fouad Lakhdari
    Nabil Belkhir
    Djamel Bouzid
    Volker Herold
    The International Journal of Advanced Manufacturing Technology, 2019, 102 : 1421 - 1431
  • [27] Prediction method and measurement of the depth of subsurface damage of glass-ceramic by lapping process
    Bai, M. (403315237@qq.com), 1600, Science Press (41):
  • [28] Annealing of glass surface roughness and subsurface irregularities characterised by means of emanation thermal analysis
    Balek V.
    Banba T.
    Bekman I.N.
    Málek Z.
    Šubrt J.
    Journal of Thermal Analysis and Calorimetry, 2000, 60 (3) : 989 - 996
  • [29] Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass-ceramic
    Esmaeilzare, A.
    Rahimi, A.
    Rezaei, S. M.
    APPLIED SURFACE SCIENCE, 2014, 313 : 67 - 75
  • [30] Annealing of glass surface roughness and subsurface irregularities characterised by means of emanation thermal analysis
    Balek, Y
    Banba, T
    Bekman, IN
    Málek, Z
    Subrt, JA
    JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY, 2000, 60 (03) : 989 - 996
12345