Defect detection methodology on the back-end process: A case of study

被引：1
|
作者：
Martin, H [1 ]
Bichebois, P [1 ]
机构：
[1] CTR COMMUN CNET SGS THOMSON,F-38920 CROLLES,FRANCE
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X | 1996年 / 2725卷
关键词：
laser scattering; optical bright-field; inspection; review; optical dark-field; electrical yield prediction; W selective process; optical microscope; AFM analysis; SEM analysis; size correlation;
D O I：
10.1117/12.240087
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：233 / 241
页数：9
相关论文
共 50 条
  • [11] Here's the case for back-end factory automation
    Weiss, M
    SOLID STATE TECHNOLOGY, 1998, 41 (11) : 140 - +
  • [12] Metal and Dielectric Thickness: a Comprehensive Methodology for Back-End Electrical Characterization
    Bortesi, L.
    Vendrame, L.
    ICMTS 2009: 2009 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, 2009, : 196 - 200
  • [13] Modeling the impact of back-end process variation on circuit performance
    Sylvester, Dennis
    Nakagawa, O.Sam
    Hu, Chenming
    International Symposium on VLSI Technology, Systems, and Applications, Proceedings, 1999, : 58 - 61
  • [14] Emerging back-end opportunities
    不详
    NUCLEAR ENGINEERING INTERNATIONAL, 2014, 59 (715): : 15 - 15
  • [15] Yield management by threshold voltage adjustment in back-end process
    Ito, S
    Noguchi, K
    Horiuchi, T
    MICROELECTRONIC DEVICE TECHNOLOGY II, 1998, 3506 : 184 - 191
  • [16] DIGITAL BACK-END FOR RFI DETECTION AND MITIGATION IN MICROWAVE RADIOMETERS
    Forte, G. F.
    Camps, A.
    Ramos, I.
    Vall-Llossera, M.
    2012 IEEE INTERNATIONAL GEOSCIENCE AND REMOTE SENSING SYMPOSIUM (IGARSS), 2012, : 2953 - 2955
  • [17] BACK-END NETWORK APPROACHES
    THORNTON, JE
    COMPUTER, 1980, 13 (02) : 10 - 17
  • [18] Development of Back-end Process Integration for Implantable Neurostimulation Application
    Chen, Po-Chun
    Ku, Heng-An
    Lin, Pin-Cheng
    2017 IEEE 19TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2017,
  • [19] Performance Evaluation of Back-End Frameworks: A Comparative Study
    Carmo, Klayver Ximenes
    Ferreira, Fischer Jonatas
    Figueiredo, Eduardo
    PROCEEDINGS OF THE 20TH BRAZILIAN SYMPOSIUM ON INFORMATIONS SYSTEMS, SBSI 2024, 2024,
  • [20] DIGITAL BACK-END FOR RFI DETECTION AND MITIGATION IN EARTH OBSERVATION
    Forte, G. F.
    Querol, J.
    Park, H.
    Camps, A.
    2013 IEEE INTERNATIONAL GEOSCIENCE AND REMOTE SENSING SYMPOSIUM (IGARSS), 2013, : 1908 - 1911
12345