Key Equipments for O3-based Wet-Chemical Surface Engineering and PVD Processes Tailored for High-Efficiency Silicon Heterojunction Solar Cells

被引：2
|
作者：
Zhang, Zhenhao [1 ]
Huber, Marco [1 ]
Corda, Mirza [1 ]
机构：
[1] SINGULUS TECHNOL AG, D-63796 Kahl, Germany
来源：
PROCEEDINGS OF THE SNEC 11TH INTERNATIONAL PHOTOVOLTAIC POWER GENERATION CONFERENCE & EXHIBITION | 2017年 / 130卷
关键词：
HJT; O-3-based cleaning; PVD;
D O I：
10.1016/j.egypro.2017.09.410
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
SINGULUS TECHNOLOGIES AG has been dedicated to realizing multiple HJT-projects worldwide up to gigawatt dimension. In this contribution key equipments including advanced wet-chemical texturing and cleaning processes based on ozone (O-3) and PVD (Physical Vapour Deposition) for ITO (Indium Tin Oxide) layers are reviewed, which are developed and optimized together with industrial and institutional partners. (C) 2017 The Authors. Published by Elsevier Ltd.
引用
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页码：31 / 35
页数：5
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