Nanofabrication with UV Femtosecond Fiber Laser

In this paper, a UV femtosecond fiber laser direct writing is used for nanofabrication on different materials. The smallest line widths are found to be around 100 nm for both glass and polymer materials. It is found that the size of direct written features depends strongly upon pulse energy, as well as the relative position of the laser focal spot with respect to the material surface. Furthermore, periodic nano structures are also fabricated on the surfaces and the periodic patterns extend coherently over many overlapping laser pulses and scanning tracks. Nano-periodic structures with 100 nm period and grooves with about 50 nm width and 50 nm depth were found. This UV fs fiber laser based technique is inherently simple, direct, highly-reproducible and material independent.