Advances in materials for optoelectronic, microelectronic and Moems/Mems packaging

被引:12
|
作者
Zweben, C [1 ]
机构
[1] Adv Thermal Mat Consultant, Devon, PA 19333 USA
关键词
materials; composites; thermal management; alloys; carbon fibers; Al/SiC; carbon foam; pyrolytic graphite; metal matrix composites; polymer matrix composites; carbon/carbon composites;
D O I
10.1109/STHERM.2002.991342
中图分类号
O414.1 [热力学];
学科分类号
摘要
Materials selection impacts performance, reliability, weight, manufacturability and cost. A variety of new advanced composite and monolithic materials are now available that provide great advantages over conventional materials for dimensional stability and thermal management in microelectronic, optoelectronic, micro-opto-electro-mechanical (MOEMS) and micro-electro-mechanical (MEMS) packaging, including: extremely high thermal conductivities (up to more than four times that of copper); tailorable coefficients of thermal expansion (from -2 to +60 ppm/K); extremely high strengths and stiffnesses; low densities; and low cost, net shape fabrication processes. Materials with low thermal conductivities and CTEs are also available. The payoffs are: improved fiber alignment; reduced thermal stresses and warpage; lower junction temperatures; simplified thermal design; possible elimination of heat pipes; weight savings up to 80%; size reductions up to 65%; increased reliability; increased manufacturing yield and cost reductions. There are many advanced packaging materials. They fall into five main categories, monolithic carbonaceous materials, metal matrix composites (MMCs), polymer matrix composites (PMCs), carbon/carbon composites (CCCs) and advanced metallic alloys. In addition to numerous aerospace industry applications, some of these materials are now being used in relatively high volume commercial products, such as servers, notebook computers, cellular telephone base stations and power supplies for trains and hybrid automobiles like the Toyota Prius. In this paper, we present an overview of what we consider the key advanced composite and monolithic materials for microelectronic, optoelectronic and MOEMS/MEMS packaging, comparing them with traditional materials.
引用
收藏
页码:30 / 34
页数:5
相关论文
共 50 条
  • [21] Nano materials for microelectronic and photonic packaging
    Wong C.-P.
    Lin W.
    Zhu L.-B.
    Jiang H.-J.
    Zhang R.-W.
    Li Y.
    Moon K.-S.
    Frontiers of Optoelectronics in China, 2010, 3 (2): : 139 - 142
  • [22] Microelectronic packaging trends: Materials and processes
    Chen, WT
    Lahiri, SK
    1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 540 - 540
  • [23] Integration possibilities with MOEMS/MEMS devices and packaging technologies using a MEMS simulation tool
    Dokmeci, M
    Kirkos, G
    OPTOELECTRONIC INTERGRATED CIRCUITS AND PACKAGING V, 2001, 4290 : 116 - 127
  • [24] Review of Packaging of Optoelectronic, Photonic, and MEMS Components
    Tekin, Tolga
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2011, 17 (03) : 704 - 719
  • [25] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX: Introduction
    Kullberg, Richard C.
    Ramesham, Rajeshuni
    Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7592
  • [26] Packaging solutions for MEMS/MOEMS using thin films as mechanical components
    Boyle, P
    Syms, RRA
    Moore, DF
    DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002, 2002, 4755 : 496 - 507
  • [27] Special issue on design, test, integration and packaging of MEMS/MOEMS, 2012
    Microsystem Technologies, 2013, 19 : 773 - 773
  • [28] Special issue on design, test, integration and packaging of MEMS/MOEMS, 2011
    Courtois, Bernard
    Michel, Bernd
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2012, 18 (11): : 1759 - 1759
  • [29] Advances in photonic MOEMS-MEMS device thinning and polishing
    McAneny, James J.
    Kennedy, Mark
    McGroggan, Tom
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XV, 2010, 7590
  • [30] Special issue on design, test, integration and packaging of MEMS/MOEMS, 2012
    Courtois, Bernard
    Michel, Bernd
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (06): : 773 - 773