Ion transport mechanisms in a filtered cathodic vacuum arc (FCVA) system

被引：0
|
作者：
Bilek, MMM [1 ]
Yin, Y [1 ]
McKenzie, DR [1 ]
Milne, WI [1 ]
机构：
[1] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE CB2 1PZ,ENGLAND
来源：
ISDEIV - XVIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, VOLS I AND II | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：962 / 966
页数：5
相关论文
共 50 条
  • [21] Study of TiN films by filtered cathodic vacuum arc techniques
    Tay, BK
    Shi, X
    Yang, HS
    Liu, EJ
    Cheah, LK
    Tan, HS
    SURFACE ENGINEERING, 1999, 15 (01) : 33 - 37
  • [22] Effects of N ion energy on titanium nitride films deposited by ion assisted filtered cathodic vacuum arc
    Yu, GQ
    Tay, BK
    Lau, SP
    Prasad, K
    Pan, LK
    Chai, JW
    Lai, D
    CHEMICAL PHYSICS LETTERS, 2003, 374 (3-4) : 264 - 270
  • [23] Characterization of a filtered high current pulsed cathodic vacuum arc plasma source:: Plasma transport analysis
    Sangines, R.
    Andruczyk, D.
    Tarrant, R. N.
    Bilek, M. M. M.
    McKenzie, Dr.
    PLASMA 2007, 2008, 993 : 337 - 340
  • [24] Aligned InN nanofingers prepared by the ion-beam assisted filtered cathodic vacuum arc technique
    Ji, XH
    Lau, SP
    Yang, HY
    Yu, SF
    NANOTECHNOLOGY, 2005, 16 (12) : 3069 - 3073
  • [25] Electrical properties of TiN films deposited by filtered cathodic vacuum arc
    Cheng, YH
    Tay, BK
    Lau, SP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (05): : 2000 - 2006
  • [26] Fabrication of ITO thin films by filtered cathodic vacuum arc deposition
    Chen, BJ
    Sun, XW
    Tay, BK
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 106 (03): : 300 - 304
  • [27] Properties of tetrahedral amorphous carbon deposited by a filtered cathodic vacuum arc
    Chhowalla, M
    Chen, CW
    Kleinsorge, B
    Robertson, J
    Amaratunga, GAJ
    Milne, WI
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 299 - 304
  • [28] Surface modification of magnetic recording media by filtered cathodic vacuum arc
    Zhang, H.-S.
    Komvopoulos, K.
    Journal of Applied Physics, 2009, 106 (09):
  • [29] Study of plasma efficiency as a function of arc current in filtered cathodic vacuum arc systems
    Tay, BK
    You, GF
    Lau, SP
    Sheeja, D
    DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 947 - 951
  • [30] Deposition of (Ti, Al)N films by filtered cathodic vacuum arc
    Cheng, YH
    Tay, BK
    Lau, SP
    Shi, X
    Chua, HC
    THIN SOLID FILMS, 2000, 379 (1-2) : 76 - 82
12345