Integration of high-frequency carrier-type thin-film magnetic field sensor with SmCo thin-film bias magnet

被引：7
|
作者：
Takezawa, M
Kim, YH
Ishiyama, K
Baba, M
Ajiro, N
Yamaguchi, M
Arai, KI
Wako, N
Abe, I
机构：
[1] Tohoku Univ, Res Inst Elect Commun, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Pukyong Natl Univ, Coll Engn, Dept Elect Engn, Pusan, South Korea
[3] Tokin Corp, Taihaku Ku, Sendai, Miyagi 9820003, Japan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1999年 / 35卷 / 05期
关键词：
SmCo thin-film magnet; high-frequency carrier-type thin-film magnetic field sensor; non-uniform bridge-connected sensor; GMI sensor;
D O I：
10.1109/20.800630
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A bridge-connected high-frequency carrier-type thin-film magnetic field sensor is fabricated on a SmCo magnetic thin-him which provides an in-plane de bias magnetic field to the sensor. The de bias field of 320 A/m was achieved by using a 3 mu m thick SmCo underlayer. The sensitivity obtained was 8.4 mV/Oe which was 12 Limes as large as the sensitivity without the SmCo thin-film magnet.
引用
收藏
页码：3682 / 3684
页数：3
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