A negative-working alkaline developable photoresist based on calix[4]resorcinarenes, a cross-linker, and a photoacid generator.

被引：0
|
作者：
Ueda, M [1 ]
Takahashi, D [1 ]
Nakayama, T [1 ]
Haba, O [1 ]
机构：
[1] YAMAGATA UNIV,GRAD SCH ENGN,DEPT HUMAN SENSING & FUNCT SENSOR ENGN,YONEZAWA,YAMAGATA 992,JAPAN
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1997年 / 214卷
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D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：279 / PMSE
页数：1
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