Development of All-solid-state Thin-film Secondary Battery for MEMS and IoT Device

被引：5
|
作者：
Suzuki, A. [1 ]
Sasaki, S. [1 ]
Jimbo, T. [1 ]
机构：
[1] ULVAC Inc, Inst Semicond & Elect Technol, Chigasaki, Kanagawa, Japan
来源：
18TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS | 2019年 / 1407卷
关键词：
STRUCTURAL-CHANGES; LITHIUM;
D O I：
10.1088/1742-6596/1407/1/012037
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
All-solid-state thin-film secondary battery (TFB) has come to recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices which are indispensable for internet-of-things (IoT) solution. This paper presents on anode material development for TFB. Silicon is promising candidate to replace metallic lithium due to high heat-resistant and even high theoretical specific capacity. In this work, the effect of titanium addition on sputtered silicon electrode performance was investigated in order to improve not only mechanical damage but also resistivity.
引用
收藏
页数：4
相关论文
共 50 条
  • [41] Thin Film All-solid-state Battery Using Li2MnO3 Epitaxial Film Electrode
    Hikima, Kazuhiro
    Suzuki, Kota
    Taminato, Sou
    Hirayama, Masaaki
    Yasuno, Satoshi
    Kanno, Ryoji
    CHEMISTRY LETTERS, 2019, 48 (03) : 192 - 195
  • [42] Studies on lithium phosphorous oxynitride electrolyte thin films and a new all-solid-state thin film lithium battery
    Liu, WY
    Fu, ZW
    Qin, QZ
    ACTA CHIMICA SINICA, 2004, 62 (22) : 2223 - 2227
  • [43] Materials for all-solid-state thin-film rechargeable lithium batteries by sol-gel processing
    Vinod, MP
    Bahnemann, D
    JOURNAL OF SOLID STATE ELECTROCHEMISTRY, 2002, 6 (07) : 498 - 501
  • [44] High-Voltage All-Solid-State Thin-Film Lithium Batteries Enabled by LiF Interlayer
    Duan, Zeqing
    Zhu, Jie
    Lin, Jie
    Qu, Shasha
    Lin, Liang
    Gao, Guiyang
    Wang, Laisen
    Peng, Dong-Liang
    JOURNAL OF PHYSICAL CHEMISTRY LETTERS, 2024, 15 (14): : 3812 - 3819
  • [45] Materials for all-solid-state thin-film rechargeable lithium batteries by sol-gel processing
    M. Vinod
    D. Bahnemann
    Journal of Solid State Electrochemistry, 2002, 6 : 498 - 501
  • [46] Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries
    Julien, Christian M.
    Mauger, Alain
    Hussain, Obili M.
    MATERIALS, 2019, 12 (17)
  • [47] Long-cycle-life Li2MnO3 thin-film cathode enabled by all-solid-state battery configuration
    Li, Qichanghao
    Liu, Wei
    Wang, Jinshi
    Xia, Qiuying
    Xia, Hui
    Journal of Power Sources, 2024, 602
  • [48] Development of a compact all-solid-state lithium secondary battery using single-crystal electrolyte — Towards realizing oxide-type all-solid-state lithium secondary batteries
    Kataoka K.
    Akao T.
    Nagata H.
    Nagai H.
    Akimoto J.
    Akedo J.
    Synthesiology, 2021, 12 (01): : 29 - 40
  • [49] Cycle stability increase by insertion of Li-La-Ta-O thin-film electrolyte between cathode and solid electrolyte for all-solid-state battery
    Lee, You Na
    Yoon, Young Soo
    THIN SOLID FILMS, 2015, 579 : 75 - 80
  • [50] Bending impact on the performance of a flexible Li4Ti5O12-based all-solid-state thin-film battery
    Sepulveda, Alfonso
    Speulmanns, Jan
    Vereecken, Philippe M.
    SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2018, 19 (01) : 454 - 464
12345