Towards Reel-to-Reel Integration of Ultra-Thin Chips to Polymer Foils

被引:2
|
作者
Tichem, Marcel [1 ]
Cauwe, Maarten [2 ]
Hajdarevic, Zlatko [3 ]
Kuran, Emine Eda [1 ]
Naveh, Benny [4 ]
Sridhar, Ashok [5 ]
Weissel, Philipp [6 ]
机构
[1] Delft Univ Technol, Micro & Nano Engn Lab, Delft, Netherlands
[2] IMEC, Ctr Microsyst Technol, Ghent, Belgium
[3] Datacon GmbH, Radfeld, Austria
[4] Orbotech Ltd, Tel Aviv, Israel
[5] Holst Ctr, Eindhoven, Netherlands
[6] Plast Elect, Linz, Austria
关键词
D O I
10.1109/ESTC.2012.6542070
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The EU FP7 funded project Chip2Foil aims to realise a technology platform allowing a radically different implementation of the assembly process for ultra-thin chips (UTCs) to polymer foils. The process is based on redistribution of the tolerance budget, and consists of two major steps: self-assembly supported chip placement followed by an adaptive circuitry approach for realising the electrical interconnects. The concept accepts non-contact, low precision presentation of a UTC to the self-assembly force field, which brings the chip to a final position with moderate precision. Next, in an adaptive interconnection process the chip position is measured with respect to the circuitry on the foil and interconnects are created on an individual chip and IO basis. The main technology building blocks are described and the current performance is demonstrated, including chip thinning, fast UTC release from wafer tape, self-assembly supported chip placement using magnetic forces and adaptive electrical interconnection by laser scribing of a screen-printed silver patch.
引用
收藏
页数:6
相关论文
共 50 条
  • [41] Self-Aligned Through Silicon Vias in Ultra-Thin Chips for 3D-Integration
    Ferwana, Saleh
    Harendt, Christine
    Letzkus, Florian
    Burghartz, Joachim N.
    2012 4TH ELECTRONIC SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE (ESTC), 2012,
  • [42] Stress and reliability analysis of electronic packages with ultra-thin chips
    Shkarayev, S
    Savastiouk, S
    Siniaguine, O
    JOURNAL OF ELECTRONIC PACKAGING, 2003, 125 (01) : 98 - 103
  • [43] Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips
    Gupta, Shoubhik
    Vilouras, Anastasios
    Dahiya, Ravinder
    MICROELECTRONIC ENGINEERING, 2020, 221
  • [44] Ultra-thin chips for high-performance flexible electronics
    Shoubhik Gupta
    William Taube Navaraj
    Leandro Lorenzelli
    Ravinder Dahiya
    npj Flexible Electronics, 2
  • [45] Anomalous Stress Effects in Ultra-Thin Silicon Chips on Foil
    Hassan, Mahadi-Ul
    Rempp, Horst
    Hoang, Tu
    Richter, Harald
    Wacker, Nicoleta
    Burghartz, Joachim N.
    2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, 2009, : 499 - 502
  • [46] Ultra-thin chips for high-performance flexible electronics
    Gupta, Shoubhik
    Navaraj, William Taube
    Lorenzelli, Leandro
    Dahiya, Ravinder
    NPJ FLEXIBLE ELECTRONICS, 2018, 2 (01)
  • [47] Sorption and swelling in ultra-thin polymer films
    Meier, F
    Schiewe, B
    Esker, A
    Wegner, G
    MACROMOLECULAR SYMPOSIA, 1999, 145 : 161 - 168
  • [48] Deformation mechanisms in ultra-thin polymer glasses
    Crosby, Alfred
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2019, 257
  • [49] Creep behavior of ultra-thin polymer films
    O'Connell, Paul A.
    Hutcheson, Stephen A.
    McKenna, Gregory B.
    JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 2008, 46 (18) : 1952 - 1965
  • [50] Surface tracks on ultra-thin polymer films
    Thomaz, R. S.
    Barbosa, L. G.
    Silva, M. R.
    Esteves, C. R. B.
    Papaleo, R. M.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 4, 2013, 10 (04): : 611 - 613