Calibration of optical systems for the measurement of microcomponents

被引：18
|
作者：
Pedrini, G. [1 ]
Gaspar, J. [2 ]
Wu, T. [1 ]
Osten, W. [1 ]
Paul, O. [2 ]
机构：
[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
[2] Univ Freiburg, Dept Microsyst Engn, IMTEK, D-79110 Freiburg, Germany
来源：
OPTICS AND LASERS IN ENGINEERING | 2009年 / 47卷 / 02期
关键词：
Calibration; Holography; Interferometry; Speckle; MEMS; SHIFTING SPECKLE INTERFEROMETRY;
D O I：
10.1016/j.optlaseng.2008.05.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Optical coherent techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. This paper presents a strategy for the calibration that involves at first the development of micromechanical reference components deforming in a reproducible retraceable and precise way when submitted to standard loadings. These reference materials are then used for the calibration of the measuring systems. Guidelines for building and measuring reference materials together with methods for evaluating the measurement uncertainty are presented. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：203 / 210
页数：8
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