Calibration of optical systems for the measurement of microcomponents

被引：18
|
作者：
Pedrini, G. [1 ]
Gaspar, J. [2 ]
Wu, T. [1 ]
Osten, W. [1 ]
Paul, O. [2 ]
机构：
[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
[2] Univ Freiburg, Dept Microsyst Engn, IMTEK, D-79110 Freiburg, Germany
来源：
OPTICS AND LASERS IN ENGINEERING | 2009年 / 47卷 / 02期
关键词：
Calibration; Holography; Interferometry; Speckle; MEMS; SHIFTING SPECKLE INTERFEROMETRY;
D O I：
10.1016/j.optlaseng.2008.05.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Optical coherent techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. This paper presents a strategy for the calibration that involves at first the development of micromechanical reference components deforming in a reproducible retraceable and precise way when submitted to standard loadings. These reference materials are then used for the calibration of the measuring systems. Guidelines for building and measuring reference materials together with methods for evaluating the measurement uncertainty are presented. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：203 / 210
页数：8
相关论文
共 50 条
  • [1] Development of Reference Standards for the Calibration of Optical Systems Used in the Measurement of Microcomponents
    Pedrini, G.
    Gaspar, J.
    Osten, W.
    Paul, O.
    STRAIN, 2010, 46 (01) : 79 - 88
  • [2] Optical Temperature Measurement Method for Glowing Microcomponents
    M. Shpak
    P. Kärhä
    M. Ojanen
    E. Ikonen
    M. Heinonen
    International Journal of Thermophysics, 2010, 31 : 1762 - 1770
  • [3] Optical Temperature Measurement Method for Glowing Microcomponents
    Shpak, M.
    Karha, P.
    Ojanen, M.
    Ikonen, E.
    Heinonen, M.
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2010, 31 (8-9) : 1762 - 1770
  • [4] STANDARDS FOR CALIBRATION OF OPTICAL RADIATION MEASUREMENT SYSTEMS
    SCHNEIDER, WE
    GOEBEL, DG
    LASER FOCUS-ELECTRO-OPTICS, 1984, 20 (09): : 82 - &
  • [5] The qualification of optical measurement techniques for the investigation of material parameters of microcomponents
    Osten, W
    Jüptner, W
    Seebacher, S
    Baumbach, T
    MICROSYSTEMS METROLOGY AND INSPECTION, 1999, 3825 : 152 - 164
  • [6] On the calibration of optical full-field strain measurement systems
    Whelan, M.
    Hack, E.
    Siebert, T.
    Burguete, R.
    Patterson, E. A.
    Saleem, Q.
    Advances in Experimental Mechanics IV, 2005, 3-4 : 397 - 402
  • [7] Calibration and evaluation of optical systems for full-field strain measurement
    Patterson, Eann A.
    Hack, Erwin
    Brailly, Philippe
    Burguete, Richard L.
    Saleem, Qasim
    Siebert, Thorsten
    Tomlinson, Rachel A.
    Whelan, Maurice P.
    OPTICS AND LASERS IN ENGINEERING, 2007, 45 (05) : 550 - 564
  • [8] A measurement and evaluation of the surface topography of microcomponents
    Horsch, C
    Schulze, V
    Löhe, D
    PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY, 2005, 42 (08): : 377 - 386
  • [9] The Measurement and Calibration of Sound Reproducing Systems
    Toole, Floyd E.
    JOURNAL OF THE AUDIO ENGINEERING SOCIETY, 2015, 63 (7-8): : 512 - 541
  • [10] MEASUREMENT SYSTEMS CALIBRATION - MICROCOMPUTER IMPLEMENTATION
    REINKING, RM
    LAOURIS, Y
    STUART, DG
    COMPUTER METHODS AND PROGRAMS IN BIOMEDICINE, 1991, 36 (01) : 1 - 8
12345