Numerical Dispersion Compensation for Optical Coherence Tomography on 3D Microstructure

被引:0
|
作者
Wang, Yu-Ta [1 ]
Tsai, Meng-Ko [1 ]
Chang, Chia-Kai [1 ]
Tsai, Chien-Chung [1 ]
Huang, Sheng-Lung [1 ]
机构
[1] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 106, Taiwan
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A vertically aligned liquid crystal display panel was inspected with an optical coherence tomography system. The in-depth signal dispersion was numerically compensated so that high axial resolution can be maintained throughout the 3D microstructure.
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页数:2
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