Field emission for resonance sensing in MEMS/NEMS

被引：0
|
作者：
Yang, C. K. [1 ]
le Febre, A. J. [2 ]
Pandraud, G. [3 ]
van der Drift, E. [3 ]
French, P. J. [1 ]
机构：
[1] Deflt Univ Technol, Elect Instrumentat Labs, NL-2628 CD Delft, Netherlands
[2] Univ Twente, MESA, Inst Nanotechnol, POB 217, NL-7522 NM Enschede, Netherlands
[3] Kavali Inst, NL-2628 CJ Delft, Netherlands
来源：
2007 IEEE 20TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE | 2007年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：63 / +
页数：2
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