NiTi/Pb(Zr0.52Ti0.48)O3 thin film heterostructures for vibration damping in MEMS

被引：7

作者：

Choudhary, Nitin ^{[1
,2
]}

Kharat, D. K. ^{[3
]}

Van Humbeeck, J. ^{[3
]}

Kaur, Davinder ^{[1
,2
]}

机构：

[1] Indian Inst Technol, Funct Nanomat Res Lab, Dept Phys, Roorkee 247667, Uttarakhand, India

[2] Indian Inst Technol, Ctr Nanotechnol, Roorkee 247667, Uttarakhand, India

[3] Katholieke Univ Leuven, Dep MTM, B-3001 Louvain, Belgium

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 193卷

关键词：

Magnetron sputtering; Shape memory materials; Piezoelectric materials; Nanoindentation; Vibration damping; INDENTATION CREEP; INTERNAL-FRICTION;

D O I：

10.1016/j.sna.2012.12.005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the damping properties of NiTi/Pb(Zr0.52Ti0.48)O-3 (PZT) heterostructures using nanoindentation technique. Creep and impact tests were performed to obtain hardness (H), elastic modulus (E-r), damping factor (tan delta) and figure of merit (FOM. A hold time of 30 s during creep test shows significant improvement in damping factor for NiTi/PZT (0.046) and CrTiN/NiTi/PZT (0.050). Impact test demonstrates highest damping capacity with lowest coefficient of restitution (0.30) in CrTiN/NiTi/PZT. Higher hardness (19.8 GPa) and excellent figure of merit (0.751) in CrTiN/NiTi/PZT makes them very attractive damping material for microelectromechanical systems (MEMS). (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：30 / 34

页数：5

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