Guided wave measurements for characterization of sol-gel layers

被引：3

作者：

Piombini, Herve ^{[1
]}

Dieudonne, Xavier ^{[1
]}

Wood, Thomas ^{[2
]}

Flory, Francois ^{[2
]}

机构：

[1] CEA, DAM LE RIPAULT, F-37260 Monts, France

[2] Fac Sci & Tech St Jerome, IM2NP, F-13397 Marseille 20, France

来源：

OPTICAL REVIEW | 2013年 / 20卷 / 05期

关键词：

m-line; sol-gel; refractive index; extinction coefficient; FILMS; COATINGS; STRESS; POLYVINYLPYRROLIDONE;

D O I：

10.1007/s10043-013-0073-7

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Sol-gel applications require very thick layers with a good understanding of the interfaces. To address this problem, we have installed at CEA Le Ripault a characterization bench using guided waves with assistance from the IM2NP lab in Marseille. This bench allows us to measure the thickness and the refractive index and determine the extinction coefficient of a thin layer. We can distinguish losses at interfaces from those in the bulk according to the chosen propagation mode. This allows us to know if we can stack elementary layers to make thick layers without incurring problems. (C) 2013 The Japan Society of Applied Physics

引用

页码：426 / 432

页数：7

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