Thin film interfaces for micro electrochemical sensors

被引:0
|
作者
Tvarozek, V [1 ]
Ivanic, R [1 ]
Jakubec, A [1 ]
Novotny, I [1 ]
Rehacek, V [1 ]
机构
[1] Slovak Univ Technol Bratislava, Dept Microelect, SK-81219 Bratislava, Slovakia
关键词
thin film microelectrodes; microelectrochemical sensors; BLM;
D O I
10.1117/12.440183
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Planar microelectrochemical chips with thin film electrodes (Pt, Au, Ag/AgCl) of different shapes and arrangement (rectangular, circular, microdisk or interdigitated array), have been developed and fabricated. Microelectrochemical cell with closely vertically spaced electrodes (in sub tm-range) allows to exploit the effect of redox recycling and an increase of collection efficienty for a high current amplification. PC simulations of electro-mechanical properties of sl-BLM is useful tool for evaluation and prediction of BLM behaviour. Non-symmetric microelectrode arrays were designed and fabricated for electrical monitoring of human skin.
引用
收藏
页码:183 / 188
页数:6
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