AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

被引：41

作者：

Sorokin, B. P. ^{[1
]}

Kvashnin, G. M. ^{[1
]}

Volkov, A. P. ^{[1
]}

Bormashov, V. S. ^{[1
]}

Aksenenkov, V. V. ^{[1
]}

Kuznetsov, M. S. ^{[1
]}

Gordeev, G. I. ^{[2
]}

Telichko, A. V. ^{[2
]}

机构：

[1] Technol Inst Superhard & Novel Carbon Mat, 7A Cent Naya St, Troitsk 142190, Russia

[2] Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Region, Russia

来源：

APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 11期

关键词：

THIN-FILM; FREQUENCY-SPECTRA;

D O I：

10.1063/1.4798333

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q similar to 10(4) has been found at 6-7 GHz band. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798333]

引用

页数：3

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