AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

被引：41
|
作者：
Sorokin, B. P. [1 ]
Kvashnin, G. M. [1 ]
Volkov, A. P. [1 ]
Bormashov, V. S. [1 ]
Aksenenkov, V. V. [1 ]
Kuznetsov, M. S. [1 ]
Gordeev, G. I. [2 ]
Telichko, A. V. [2 ]
机构：
[1] Technol Inst Superhard & Novel Carbon Mat, 7A Cent Naya St, Troitsk 142190, Russia
[2] Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Region, Russia
来源：
APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 11期
关键词：
THIN-FILM; FREQUENCY-SPECTRA;
D O I：
10.1063/1.4798333
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q similar to 10(4) has been found at 6-7 GHz band. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798333]
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页数：3
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