Effect of film thickness and curing temperature on the sensitivity of ZnO:Sb thick-film hydrogen sensor

被引：25
|
作者：
Dayan, NJ
Karekar, RN
Aiyer, RC
Sainkar, SR
机构：
[1] UNIV PUNE,CTR ADV STUDIES MAT SCI & SOLID STATE PHYS,PUNE 411007,MAHARASHTRA,INDIA
[2] NATL CHEM LAB,PUNE,MAHARASHTRA,INDIA
来源：
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 1997年 / 8卷 / 05期
关键词：
D O I：
10.1023/A:1018579104634
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the effect of film thickness and curing temperature on the sensitivity of the screen-printed thick-film ZnO (incorporated with 7 wt%Sb) H-2, CO and CH4 sensors. The sensitivity of the sensors increases up to 60 mu m and decreases for higher film thickness. Increase in the curing temperature of the films, decreases the sensitivity of the sensors because of the increase in the average grain size, as observed by scanning electron microscopy.
引用
收藏
页码：277 / 279
页数：3
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