Study on Calibration Technology for Helium Mass-spectrometer Leak Detector

To calibrate the helium mass-spectrometer leak detector in-site in the whole range, a series of leaks with helium-permeable membranes of different leakage rates were connected to a helium mass-spectrometer leak detector separately, then a set of readings of standard leaks were gained, and the relation curves were fitted mathematically between the standard leakage rates and leakage readings so as to give a fitting formula between the whole-range readings and leakage rates. As a result, the simplicity and efficiency method make it suitable for calibrations of helium mass-spectrometer leak detector.