On line diagnostics and support as a key part of process module control

被引：0
|
作者：
Locy, M [1 ]
机构：
[1] KLA Tencor, San Jose, CA 95134 USA
来源：
ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年
关键词：
D O I：
10.1109/ISSM.2000.993655
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A now method of service delivery in the semiconductor industry is required. Current equipment support implementations fail to address the requirements of the industry for both the equipment supplier and the semiconductor manufacturer. This work examines the development, impact, and direction of "e-diagnostics" as a viable, if not necessary, method of support delivery.
引用
收藏
页码：229 / 232
页数：4
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