Populations of argon metastable states in an argon-silane plasma of a high-frequency electric discharge

被引:0
|
作者
Baisova, B. T. [1 ]
Strunin, V. I. [1 ]
Strunina, N. N. [1 ]
Khudaiergenov, G. Zh. [1 ]
机构
[1] FM Dostoevskii Omsk State Univ, Omsk 644077, Russia
关键词
populations of metastable states; intensity of spectral line; balance equation; population and de-excitation (depopulation) processes;
D O I
10.1007/s10812-008-9095-5
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
We have determined the absolute populations of argon metastable states in the plasma of a high-frequency discharge in a pure argon atmosphere and in a mixture of argon and silane.
引用
收藏
页码:739 / 742
页数:4
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