Performance evaluation of an automated material handling system for a wafer fab

被引：23

作者：

Wang, FK

Lin, JT

机构：

[1] Natl Taipei Univ Technol, Dept Ind Engn & Management, Taipei 10626, Taiwan

[2] Natl Tsing Hua Univ, Dept Ind Engn & Engn Management, Hsinchu, Taiwan

来源：

ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING | 2004年 / 20卷 / 02期

关键词：

AMHS; interbay; intrabay; performance evaluation; simulation;

D O I：

10.1016/j.rcim.2003.08.002

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Discrete-event simulation model was developed to evaluate the performance of an automated material handling system (AMHS) for a wafer fab with a zone control scheme avoiding all vehicle collision. The layout of this AMHS is a custom configuration. The track option contains turntables, turnouts and high-speed express lanes. The behavior of the interarrival for all stockers from the real data set was analyzed to verify the assumption of the simulation model. The results show that the underlying distributions of most stockers for interarrival times belong to the exponential or Weibull distribution. The simulation results show that the number of vehicles significantly affects the average delivery time and the average throughput. A simple one-factor response surface model is used to determine the appropriate vehicle numbers. This study was also investigated to determine the vehicle numbers in an automated guided vehicle-based intrabay material handling system. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：91 / 100

页数：10

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