Knowledge-based process simulation and design system for MEMS

被引：0
|
作者：
Popp, J [1 ]
Schmidt, T
Wagener, A
Hahn, K
Brück, R
Hössinger, A
机构：
[1] Univ Siegen, Inst Microsyst Technol, D-57068 Siegen, Germany
[2] Silvaco Technol Ctr, Cambridge PE27 5JL, England
来源：
MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II | 2006年 / 6035卷
关键词：
TCAD; MEMS; process management; process design; process tracking;
D O I：
10.1117/12.638483
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process designs simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.
引用
收藏
页数：8
相关论文
共 50 条
  • [21] A cognitive framework for knowledge-based process design
    Van Leijen, H
    Baets, WRJ
    6TH WORLD MULTICONFERENCE ON SYSTEMICS, CYBERNETICS AND INFORMATICS, VOL XVIII, PROCEEDINGS: INFORMATION SYSTEMS, CONCEPTS AND APPLICATIONS OF SYSTEMICS, CYBERNETICS AND INFORMATICS, 2002, : 327 - 332
  • [22] A knowledge-based simulation-optimization framework and system for sustainable process operations
    Halim, Iskandar
    Srinivasan, Rajagopalan
    COMPUTERS & CHEMICAL ENGINEERING, 2011, 35 (01) : 92 - 105
  • [23] PROTOTYPE OF A KNOWLEDGE-BASED PROGRAM SYSTEM FOR SYSTEM SIMULATION
    EICKHOFF, J
    FUTTERER, E
    CHEMIE INGENIEUR TECHNIK, 1994, 66 (08) : 1034 - 1042
  • [24] HIRES - A MULTILEVEL KNOWLEDGE-BASED SIMULATION SYSTEM
    FISHWICK, PA
    IEEE SOFTWARE, 1986, 3 (02) : 52 - 53
  • [25] A constrained knowledge-based simulation of a production system
    Jazaa, A
    MODELLING AND SIMULATION 1996, 1996, : 1028 - 1032
  • [26] KBSIM - A SYSTEM FOR INTERACTIVE KNOWLEDGE-BASED SIMULATION
    HAKMAN, M
    GROTH, T
    COMPUTER METHODS AND PROGRAMS IN BIOMEDICINE, 1991, 34 (2-3) : 91 - 113
  • [27] A PROTOTYPE KNOWLEDGE-BASED SIMULATION SUPPORT SYSTEM
    HILL, TR
    ROBERTS, SD
    SIMULATION, 1987, 48 (04) : 152 - 161
  • [28] Planning Process Families with a Knowledge-based System
    Zhang, Linda
    Xu, Qianli
    Shou, Yongyi
    2011 IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL ENGINEERING AND ENGINEERING MANAGEMENT (IEEM), 2011, : 1815 - 1820
  • [29] DESIGN OF A KNOWLEDGE-BASED ONLINE SIMULATION SYSTEM TO CONTROL A MANUFACTURING SHOP FLOOR
    MANIVANNAN, S
    BANKS, J
    IIE TRANSACTIONS, 1992, 24 (03) : 72 - 83
  • [30] SYSTEM FOR KNOWLEDGE-BASED PROCESS PLANNING.
    Tsatsoulis, Costas
    Kashyap, R.L.
    International journal for artificial intelligence in engineering, 1988, 3 (02): : 61 - 75
12345