Knowledge-based process simulation and design system for MEMS

被引：0
|
作者：
Popp, J [1 ]
Schmidt, T
Wagener, A
Hahn, K
Brück, R
Hössinger, A
机构：
[1] Univ Siegen, Inst Microsyst Technol, D-57068 Siegen, Germany
[2] Silvaco Technol Ctr, Cambridge PE27 5JL, England
来源：
MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II | 2006年 / 6035卷
关键词：
TCAD; MEMS; process management; process design; process tracking;
D O I：
10.1117/12.638483
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process designs simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.
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页数：8
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