Superior Imaging Quality of Scanning Helium-Ion Microscopy: a Look at Beam-Sample Interactions

被引：0
|
作者：
Cohen-Tanugi, D. [1 ]
Yao, N. [1 ]
机构：
[1] Princeton Inst Sci & Technol Mat, Princeton, NJ 08544 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷
基金：
美国国家科学基金会;
关键词：
D O I：
10.1017/S1431927609098687
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：656 / 657
页数：2
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