Effect of gas pressure on the lifetime of capacitive RF MEMS switches

被引：0
|
作者：
Czarnecki, P [1 ]
Rottenberg, X
Puers, R
De Wolf, I
机构：
[1] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium
[2] Katholieke Univ Leuven, EE Dept, Leuven, Belgium
来源：
MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2006年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
For the first time it is shown that the lifetime of capacitive RF MEMS switches depends on the ambient gas pressure. A change of the pressure causes a change of the electric strength of the gas and as a result electric discharging during the operation can occur. This indicates that insulator charging, the main failure mode in these switches, probably not only occurs upon contact between the top electrode and the insulator, but also without contact, due to electron emission or electrode-gap breakdown.
引用
收藏
页码：890 / 893
页数：4
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