In situ optical characterization of carbon layers formed in the initial stages of diamond growth

被引：2
|
作者：
Longueville, JL [1 ]
Moulin, S [1 ]
Bonnot, AM [1 ]
机构：
[1] CNRS, ETUD PROPRIETES ELECT SOLIDES LAB, F-38042 GRENOBLE, FRANCE
来源：
THIN SOLID FILMS | 1996年 / 281卷
关键词：
carbon; diamond; differential reflectivity;
D O I：
10.1016/0040-6090(96)08647-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The nature of the carbon layers formed in the initial stages of diamond growth was investigated by differential reflectivity measurements. Test samples produced in extreme experimental conditions (zero and high carbon concentrations) were used to achieve a better understanding of the signals observed during normal diamond growth synthesis, Several reflectivity models for rough silicon, smooth graphite and rough carbon layers were used to interpret the experimental results.
引用
收藏
页码：260 / 263
页数：4
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