Real time observation of nanoscale multiple conductive filaments in PRAM by using advanced in-situ TEM

被引：0
|
作者：
Sun, J. [1 ]
Wu, X. [1 ]
Liu, Q. [2 ]
Liu, M. [2 ]
Sun, L. T. [1 ]
机构：
[1] Southeast Univ, Sch Elect Sci & Engn, Minist Educ, SEU FEI Nanopico Ctr,Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Lab Nanofabricat & Novel Device Integrat, Beijing 100029, Peoples R China
来源：
PROCEEDINGS OF THE 2013 20TH IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2013) | 2013年
关键词：
Transmission electron microscopy (TEM); in-situ; resistive random access memory; conductive filaments; RESISTIVE SWITCHING MEMORIES;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this letter, we dynamically investigate the resistive switching characteristics and physical mechanism of the ZrO2-based device. Using in-situ transmission electron microscopy, we observe in real time that multiple conductive filaments (CFs) are formed across the ZrO2 layer between top electrode and bottom electrodes after forming. Various top electrode materials have been used, such as Cu, Ag, and Ni. Contrary to common belief, it is found that CF growth begins at the anode, rather than having to reach the cathode and grow backwards. Energy-dispersive X-ray spectroscopy results confirm that metal from the top electrode is the main composition of the CFs.
引用
收藏
页码：560 / 562
页数：3
相关论文
共 50 条
  • [21] Quasi-Static Frictional Test between Silicon Sharp Probes with in-situ TEM Observation of Real Contact Point
    Ishida, Tadashi
    Sato, Takaaki
    Nabeya, Shinsuke
    Fujita, Hiroyuki
    INTERNATIONAL CONFERENCE ON SCIENCE OF FRICTION 2010 (ICSF2010), 2010, 258
  • [22] In-situ multiple wavelength ellipsometry for real time process characterization of nitride MOCVD
    Bonanni, A
    Stifter, D
    Hingerl, K
    Sitter, H
    Schmidegg, K
    PHYSICS OF SEMICONDUCTORS, PTS A AND B, 2005, 772 : 219 - 220
  • [23] Comment on Real-Time Observation on Dynamic Growth/Dissolution of Conductive Filaments in Oxide-Electrolyte- Based ReRAM
    Valov, Ilia
    Waser, Rainer
    ADVANCED MATERIALS, 2013, 25 (02) : 162 - 164
  • [24] In-situ real time sputtering source health monitoring using ultrasonics
    Leybovich, Alex
    SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07): : 4406 - 4410
  • [25] Real-time in-situ observation of PVD of N-vinylcarbazole with FTIR-RAS
    Tamada, M
    Koshikawa, H
    Omichi, H
    THIN SOLID FILMS, 1997, 293 (1-2) : 113 - 116
  • [26] In-situ observation on the real-time filling deformation of PMMA into microchannel during hot embossing
    Liu, Jiashun
    Li, Jianzhi
    Gong, Feng
    Yang, Gao
    OPTICS AND LASER TECHNOLOGY, 2023, 167
  • [27] COMBINING HYPERSENSITIZATION AND RAPID IN-SITU PROCESSING FOR TIME-AVERAGE OBSERVATION IN REAL-TIME HOLOGRAM INTERFEROMETRY
    BIEDERMA.K
    MOLIN, NE
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1970, 3 (09): : 669 - &
  • [28] Using molecular dynamics to quantify the electrical double layer and examine the potential for its direct observation in the in-situ TEM
    Welch, David A.
    Mehdi, B. Layla
    Hatchell, Hannah J.
    Faller, Roland
    Evans, James E.
    Browning, Nigel D.
    ADVANCED STRUCTURAL AND CHEMICAL IMAGING, 2015, 1
  • [29] Real time imaging of photocatalytic active site formation during H2 evolution by in-situ TEM
    Yu, Shuohan
    Jiang, Youhong
    Sun, Yue
    Gao, Fei
    Zou, Weixin
    Liao, Honggang
    Dong, Lin
    APPLIED CATALYSIS B-ENVIRONMENTAL, 2021, 284 (284)
  • [30] Response to "Comment on Real-Time Observation on Dynamic Growth/Dissolution of Conductive Filaments in Oxide-Electrolyte-Based ReRAM"
    Liu, Qi
    Jun, Sun
    Lv, Hangbing
    Long, Shibing
    Li, Ling
    Yin, Kuibo
    Wan, Neng
    Li, Yingtao
    Sun, Litao
    Liu, Ming
    ADVANCED MATERIALS, 2013, 25 (02) : 165 - 167
12345