Fully CMOS-Compatible TiN Nanoantennas

被引：0
|
作者：
Briggs, Justin A. [1 ,2 ]
Naik, Gururaj V. [2 ]
Petach, Trevor A. [3 ]
Baum, Brian K. [2 ]
Goldhaber-Gordon, David [3 ]
Dionne, Jennifer A. [2 ]
机构：
[1] Stanford Univ, Dept Appl Phys, 348 Via Pueblo Mall, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Mat Sci & Engn, 496 Lomita Mall, Stanford, CA 94305 USA
[3] Stanford Univ, Dept Phys, 382 Via Pueblo Mall, Stanford, CA 94305 USA
来源：
2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2016年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report the first visible/NIR darkfield scattering spectroscopy measurements of single titanium nitride nanostructures. We grow these fully CMOS-compatible nanoantennas via low-temperature atomic layer deposition and characterize and correlate their optical and material properties.
引用
收藏
页数：2
相关论文
共 50 条
  • [31] CMOS-compatible electrets for application in micromechanical transducers
    Amjadi, K
    Sessler, GM
    1998 ANNUAL REPORT CONFERENCE ON ELECTRICAL INSULATION AND DIELECTRIC PHENOMENA, VOLS 1 AND 2, 1998, : 132 - 135
  • [32] CMOS-Compatible Contacts to n-InP
    Ghegin, Elodie
    Rodriguez, Philippe
    Pasquali, Mattia
    Sagnes, Isabelle
    Labar, Janos L.
    Delaye, Vincent
    Card, Tiphaine
    Da Fonseca, Jeremy
    Jany, Christophe
    Nemouchi, Fabrice
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (11) : 4408 - 4414
  • [33] A CMOS-COMPATIBLE COMPLEMENTARY SINFET HVIC PROCESS
    NG, WT
    SALAMA, CAT
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (08) : 1935 - 1942
  • [34] Characterization and modeling of a CMOS-compatible MEMS technology
    Latorre, L
    Nouet, P
    Bertrand, Y
    Hazard, P
    Pressecq, F
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) : 143 - 147
  • [35] Spin-Based CMOS-Compatible Devices
    Sverdlov, Viktor
    Selberherr, Siegfried
    LARGE-SCALE SCIENTIFIC COMPUTING, LSSC 2015, 2015, 9374 : 42 - 49
  • [36] CMOS-Compatible Memristor for Optoelectronic Neuromorphic Computing
    Facai Wu
    Chien-Hung Chou
    Tseung-Yuen Tseng
    Nanoscale Research Letters, 17
  • [37] FULLY CMOS-COMPATIBLE WAFER BONDING BASED ON PRESS MARKING USING THICK ELECTROPLATED ALUMINUM
    Al Farisi, Muhammad Salman
    Tsukamoto, Takashiro
    Tanaka, Shuji
    2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, : 1138 - 1141
  • [38] CMOS-Compatible, Flexible, Intracortical Neural Probes
    Barz, Falk
    Trouillet, Vanessa
    Paul, Oliver
    Ruther, Patrick
    IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 2020, 67 (05) : 1366 - 1376
  • [39] CMOS-Compatible High Frequency Infrared Photodiodes
    Geis, M. W.
    Spector, S. J.
    Grein, M. E.
    Schulein, R. T.
    Yoon, J. U.
    Lennon, D. M.
    Deneault, S.
    Gan, F.
    Kartner, F. X.
    Lyszczarz, T. M.
    2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 743 - +
  • [40] Ultrabroadband supercontinuum generation in a CMOS-compatible platform
    Halir, R.
    Okawachi, Y.
    Levy, J. S.
    Foster, M. A.
    Lipson, M.
    Gaeta, A. L.
    OPTICS LETTERS, 2012, 37 (10) : 1685 - 1687
12345