Fully CMOS-Compatible TiN Nanoantennas

被引：0
|
作者：
Briggs, Justin A. [1 ,2 ]
Naik, Gururaj V. [2 ]
Petach, Trevor A. [3 ]
Baum, Brian K. [2 ]
Goldhaber-Gordon, David [3 ]
Dionne, Jennifer A. [2 ]
机构：
[1] Stanford Univ, Dept Appl Phys, 348 Via Pueblo Mall, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Mat Sci & Engn, 496 Lomita Mall, Stanford, CA 94305 USA
[3] Stanford Univ, Dept Phys, 382 Via Pueblo Mall, Stanford, CA 94305 USA
来源：
2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2016年
关键词：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report the first visible/NIR darkfield scattering spectroscopy measurements of single titanium nitride nanostructures. We grow these fully CMOS-compatible nanoantennas via low-temperature atomic layer deposition and characterize and correlate their optical and material properties.
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页数：2
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